CY-O1200-50IC-MRTP-X is an affordable and compact PE-CVD
(Plasma Enhanced Chemical Vapor Deposition
) tube furnace system with slidable mechanism. It consists of a 300W RF plasma generator, a 2"O.D split tube furnace and the integrated slidable rail which allows you preheat and slide the furnace to the sample zone in order to get your sample an instant exposure under high temperature. This system can be updated to advanced model with optionals. It is ideal tool for the researcher to make innovation under limited budget.
· Lower temperature processing compared to conventional CVD.
· High heating & cooling rate using sliding furnace
· Film stress can be controlled by high/low frequency mixing techniques.
· Control over stoichiometry via process conditions.
|Slidable Split Tube furnace
||· Input power: 208 – 240V AC, 1.2kW
· 1200°C Max. working temperature for < 60 minutes
· 1100°C Max for continuous heating
· High purity quartz tube 2"OD x 1.7"ID x 39.4" Length
· 30 segments programmable precision digital temperature controller
· 8" (200mm), single zone. 2.3" (60mm) (+/-1°C) @ 1000°C The following picture shows the temp. distribution across the heating zone, please click to enlarge.
|Plasma RF Generator
||· Output Power: 5 -300W adjustable with ± 1% stability
· RF frequency: 13.56 MHz ±0.005% stability
· Reflection Power: 200W max.
· Matching: Automatic
· RF Output Port: 50 Ω, N-type, female
· Noise: <50 dB.
· Cooling: Air cooling. (water cooling is available upon request, and a water chiller can be ordered seperately)
· Power : 208-240VAC, 50/60Hz
|Vacuum Flange and Fittings
||· Vacuum flange set is made of stainless steel 304.
· Left flange assembly includes a KF-25 vacuum port, two KF-25 quick clamp,a KF-25 right angle valve, a KF-25 vacuum bellows, a flange support 1/4 O.D hose fitting, and a needle valve.
· Right flange assembly includes a digital pirani gauge, 1/4 O.D tube fitting, 1/4" feedthrough and a needle valve.
||· AC 220V 50 Hz 1/2HP 375W
· 2 Liter /S or 120 liter/m
· Oil trap (inlet) and exhaust filter (outlet) are installed.
· Max. vacuum: 10-2 torr
Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr.
||· Overall Dimensions: 1500mm x 600mm x 1200mm (all system, L x W x H)
· Net weight: 350 lbs
· Shipping weight: 480 lbs
||· Please choose below gas delivery systems based on your buddget ( click underlined or picture to order )
o Low cost Compact Anti-Corrosion Three Channel Gas Mixer
o Compact Liquid Vaporization Systems
o Three Channels MFC Gas Control System
o Constant temperature control module
||· One year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
||· CE Certified
· Temperature controller is MET and CE Certified
||· The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure)
· Attention: Due to the high pressure gas output from the gas cylinder, it is necessary to install the gas pressure regulator with it to reduce the output pressure, avoid overpressurizing the furance chamber and ensure a safe operation.
Zhengzhou CY Scientific Instrument Co., Ltd. Materials Science and Technology Co., Ltd. is a high and new technology enterprise registered in Zhengzhou city of Henan province, mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet. On the basis of sticking to independent innovation, the company absorbs extensively the advanced technology of excellent products at home and abroad. Meanwhile, the company studies, develops and manufactures various kinds of heating equipment and experimental instrument with consideration of our comprehensive national conditions. The company has solid technical force and forms a thorough research and development system by cooperating closely with a number of research institutes.At present, the company has many senior technical personnel responsible for development project, laboratories for developing and manufacturing products, processing workshops of a certain size for assembling, debugging and manufacturing and a perfect after-sales service system.The company has dozens of series of products which are widely applied in tertiary institutions and research institutes. Some products have already entered into the international market.Based on good credit and excellent service, Zhengzhou CY Scientific Instrument Co., Ltd. Materials Science and Technology Co., Ltd. has established long-term cooperative relationships with numerous enterprises. Zhengzhou CY Scientific Instrument Co., Ltd. Materials Science and Technology Co., Ltd. sincerely welcomes friends come to visit, investigate and negotiate business.Thank you very much for caring about Zhengzhou CY Scientific Instrument Co., Ltd.. We appreciate your visiting, it will deliver unbelievable confidence and recognotion to the people of Zhengzhou CY Scientific Instrument Co., Ltd.. Alothough Zhengzhou CY Scientific Instrument Co., Ltd. is a small company established by a group of idealistic nobodies.Just as ROLEX it was born and exists for its excellence and precision. Zhengzhou CY Scientific Instrument Co., Ltd. has the same dream and will repeat the same story. From the moment of birth, Zhengzhou CY Scientific Instrument Co., Ltd. aims to build a world famous furnace industry, as we know that we never lack of technology, ideas and subversive creative spirit. This can be figured out from the products which you are seeing. So we humbly ask you to remember the name-Zhengzhou CY Scientific Instrument Co., Ltd..
A group of humble people do not have a lot of rhetoric. Since we are lucky to shake hands with you, please don't hesitate to use Zhengzhou CY Scientific Instrument Co., Ltd.'s product. which will prove to you that we are qualified to be your trusted friend.